Microsystems based on piezoelectric transduction are an important class of microelectromechanical systems (MEMS). Upon other material properties, a high crystalline quality of the involved thin films incl. electrodes and piezoelectrics is essential for a proper device performance.

This project investigates the use of plasma-enhanced atomic layer deposition (PEALD) to develop seed and buffer layers of III/V nitrides within thin film stacks for piezo MEMS. It covers the process development for PEALD of III/V nitride binary and ternary compounds (saturation curves, influence of temperature, precursor choice, plasma characteristics etc.), in-depth thin film characterization such as XRD, SE, AFM, SEM to access the structural, morphological, and electrical properties, and investigation of the performance of the PEALD seed layers compared to PVD techniques. The work is performed on an industrial scale cluster tool encompassing PEALD and PVD modules.

The project aims to demonstrate PEALD as an effective method for creating high-quality III/V nitride seed layers, significantly enhancing the performance and reliability of piezoelectric MEMS.

• University degree (Diploma, Magister, Master’s) in Physics/Chemistry/Materials Science (solid state physics, chemical engineering, physical chemistry, materials science/physics/chemistry, or related) completed with above-average results*.
• Previous experience in thin film deposition and characterization.
• Excellent experimental and analytical skills.
• Strong interest in applied research, creativity in contributing ideas and eager to engage with the ALD community .
• Excellent English communication skills in written and oral form.
• Preferred qualifications:
  • prior experience with atomic layer deposition
  • knowledge on nitride materials
  • characterization skills: XRD, SE, AFM, SEM, XPS,…
  • knowledge on plasma processes
  • previous experience with peer-reviewed publishing of scientific results*see requirements of TUM admission Requirements - TUM Graduate School

• Application deadline: 3 November 2024
• Weekly working hours: 38.5
• Diversified research activities with plenty of technical challenges.
• State-of-the-art lab facilities and instruments.
• Internal and external training opportunities for further development.
• Home Office possible.
• € 4 per day food allowance in restaurants or € 2 per day in supermarkets.
• Family & kids friendly.
• Free coffee/milk/tea & fresh fruits.

For this position you will receive a monthly gross salary of EUR 3,827, which will be paid 14 times a year. Financial support for housing for stays abroad (e.g., in case of secondments) and travelling expenses will be offered on a case-by-case basis after alignment with the supervisor and the CRYSTALLINE program leader.

Application requirements:

• Applicants must not have resided and/or carried out their main activity (work, studies, etc.) in Austria for more than 12 months in the 3 years immediately before the call deadline.
• Master's degree including official evidence completed by application deadline.
• Not in possession of a Ph D degree.
• Only complete sets of application documents concatenated in a single PDF can be accepted.

Required application documents (concatenated in a single PDF in this order):

• [Mandatory] 1-page letter of motivation (in English), including a declaration of the considered research topic
• [Mandatory] CV (in English), including
  • expertise, skills, and
  • (if applicable) list of internships and publications & patents
• [Mandatory] Scanned copies of transcripts of records for bachelor and the master (or equivalent degree) including the diplomas proofing the completion of the studies (originally issued in English or German, or an official translation in alignment with the guidelines on translation and authentication)
• [Mandatory] Proof of fluency in English at minimum B2 level (Upper Intermediate English). Accepted proofs are e.g. master studies in English or an internationally accepted certificate.
• [Mandatory] Scanned copy of valid Passport/ID
• [Optional] Letter of references from academic reference persons (with contact details)
• [Optional] Authored/Co-authored publications
• [Mandatory] Master thesis

Please check all the details about the application requirements on our website: Crystalline Program Recruitment | SAL Research Network (silicon-austria.com)

Silicon Austria Labs (SAL) is a top research center for Electronics and Software Based Systems (ESBS). At three locations (Graz, Villach, Linz), SAL is conducting research along the entire ESBS value chain in the areas of sensor systems, power electronics, intelligent wireless systems, microsystems and embedded systems to develop future-oriented solutions for industrial production, health, energy, mobility, safety and more. SAL brings together key players from industry, science and research and thus valuable expertise and know-how and conducts cooperative, application-oriented research along the value chain. Cooperative projects are co-financed by SAL and enable a fast and unbureaucratic project start. SAL is thus shaping the high-tech location Austria and Europe and developing the future